Apple T Loder System은 EFEM 장치로 ASML 스캐너로 웨이퍼를 빠르고 안전하게 이송하는 역할을 합니다.
ATLS-200
ATLS-200S
ATLS-300
| SPECIFICATION | ATLS-200 | ATLS-200S | ATLS-300 |
|---|---|---|---|
| Maker/Model | ATLS-200 | ATLS-200S | ATLS-300 |
| Wafer Size | 200mm Silicon Wafer | 200mm Silicon Wafer | 300mm Silicon Wafer |
| Carrier | 25 Wafer | 25 Wafer | 25 Wafer |
| Stage Type | 4 STAGE OPEN CASSETTE TYPE | 4 SMIF Type | 4 Load Port Module (LPM) |
| EFEM color | WH020/GY227 | WH020/GY227 | WH020/GY227 |
| ELS Type | ASML XT400H | ASML XT400H | ASML XT400H |
| Port to Port Space | 290mm | 400mm | 505mm SEMI STD |
| Dimension | 1900(W)*750(D)*2100(H) | 2020(W)*845(D)*2000(H) | 2300(W)*1060(D)*2000(H) |
| Signal Lamp | 3 Lamp/Buzzer | 3 Lamp/Buzzer | 3 Lamp/Buzzer |
| Automation Interface | HSMS (secs) | HSMS (secs) | HSMS (secs) |
| Throughput | 250 WPH | 250 WPH | 250 WPH |
| Robot Accuracy | ± 0.1mm | ± 0.1mm | ± 0.1mm |
| Option | SEMI E84 Communication | SEMI E84 Communication | |
| Safety Sensor | Safety Sensor |